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1. Field of the Invention
The present invention relates to an apparatus for producing and packaging a thin film transistor, which is useful for a liquid crystal display device.
2. Description of the Related Art
A variety of semiconductor devices are used for liquid crystal display devices such as active matrix type liquid crystal display devices. Such semiconductor devices are used in a variety of fields.
In the case of producing a liquid crystal display device, a thin film transistor (hereinafter referred to as a “TFT”) as a switching element is generally provided as a driver circuit for each pixel.
In order to reduce the cost of a liquid crystal display device, it is important to reduce the number of steps in manufacturing a liquid crystal display device.
In general, the TFT is formed on a transparent glass substrate by using a complicated process. In order to improve the throughput of the process, a technique of forming a TFT simultaneously with other wirings which are made of the same conductive layer has been developed.
In general, a process of forming a TFT is divided into a process of forming a gate insulating film, a process of forming a semiconductor film, a process of forming an emitter layer, a process of forming a contact hole, and the like.
In the case of producing a liquid crystal display device, it is required to form a contact hole by etching the insulating film which is formed by depositing an inorganic material, for example.
A process of forming a contact hole by wet etching is generally necessary for producing a liquid crystal display device.#ifndef BOOST_SERIALIZATION_ARCHIVE_NO_REGISTER_HPP
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// (C) Copyright 2002 Robert Ramey –
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